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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH05102089(A)
申请公布日期
1993.04.23
申请号
JP19910262404
申请日期
1991.10.09
申请人
TOKYO ELECTRON LTD
发明人
KOSHIMIZU CHISHIO
分类号
G01N21/73;H01L21/302;H01L21/3065
主分类号
G01N21/73
代理机构
代理人
主权项
地址
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