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发明名称
CRYOSTAT
摘要
申请公布号
JPH05110146(A)
申请公布日期
1993.04.30
申请号
JP19910272334
申请日期
1991.10.21
申请人
HITACHI LTD
发明人
NEMOTO TAKEO;SAHO NORIHIDE
分类号
H01L39/04
主分类号
H01L39/04
代理机构
代理人
主权项
地址
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