SEMICONDUCTOR MANUFACTURING APPARATUS,申请号JP19910298506-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号	JPH05109620(A)	申请公布日期	1993.04.30
申请号	JP19910298506	申请日期	1991.10.15
申请人	MITSUBISHI ELECTRIC CORP	发明人	DEGUCHI MIKIO
分类号	H01L21/20;H01L21/208	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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