SEMICONDUCTOR WAFER CASSETTE CARRIER,申请号JP19910301297-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER CASSETTE CARRIER
摘要
申请公布号	JPH05114641(A)	申请公布日期	1993.05.07
申请号	JP19910301297	申请日期	1991.10.22
申请人	NIPPON STEEL CORP	发明人	OKAWA YOSHINORI
分类号	H01L21/677;H01L21/673;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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