发明名称 Protection element and method of manufacturing same
摘要 A semiconductor device comprises a semiconductor body (1) of silicon having a monolithic integrated circuit with a field oxide pattern (2) having at least one protection element (T2) having at least one active zone (4) of a first conductivity type, which adjoins at least in part the field oxide (2) and forms with the adjoining silicon region (5) of the second opposite conductivity type a pn junction (6). The active zone (4) is contacted with an electrode layer (7), which is connected to a point (G) of the semiconductor device to be protected against static discharge. The electrode layer (7) consists of a metal silicide. According to the invention, the metal silicide (7) also extends onto the field oxide (2) adjoining the active zone (4) over a certain distance, which is preferably at least 0.5 mu m.
申请公布号 US5225896(A) 申请公布日期 1993.07.06
申请号 US19910741983 申请日期 1991.08.06
申请人 U.S. PHILIPS CORPORATION 发明人 VAN ROOZENDAAL, LEONARDUS J.;NAGALINGAM, SAMUEL J. S.
分类号 H01L27/02 主分类号 H01L27/02
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