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发明名称
METHOD AND APPARATUS FOR MEASURING SIZE OF PATTERNED STRUCTURE OF LITHOGRAPH PHOTOMASK
摘要
申请公布号
JPH05187828(A)
申请公布日期
1993.07.27
申请号
JP19920179144
申请日期
1992.06.12
申请人
SAISUKIYAN SYST INC
发明人
IAN AARU SUMISU
分类号
G01B9/04;G01B11/02;G01C3/06;G03F7/20
主分类号
G01B9/04
代理机构
代理人
主权项
地址
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