发明名称 Apparatus for processing printed circuit board substrates
摘要 Apparatus for contacting a circuit board substrate with etching fluid or some other chemical includes a conveyor system comprised of upper and lower rotating disks for receiving and transporting the circuit board substrate while the substrate is contacted with fluid. The apparatus utilizes a modular drive system to drive the disks. The drive system is not exposed to the chemicals used to contact and process the circuit board substrate. The rotating disks can be removed from the apparatus without requiring disassembly of the modular drive system.
申请公布号 US5232501(A) 申请公布日期 1993.08.03
申请号 US19920839617 申请日期 1992.02.21
申请人 ADVANCED SYSTEMS INCORPORATED 发明人 PENDER, DON P.;GURIAN, MARSHALL I.
分类号 B05C13/00;H01L21/00;H01L21/677;H05K3/00 主分类号 B05C13/00
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