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发明名称
ION IMPLANTATION METHOD AND ION IMPLANTATION DEVICE
摘要
申请公布号
JPH05206049(A)
申请公布日期
1993.08.13
申请号
JP19920014615
申请日期
1992.01.30
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KITAHATA MAKOTO;DEGUCHI MASAHIRO;HIRAO TAKASHI
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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