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发明名称
ALUMINUM WIRING AND ITS FORMING METHOD
摘要
申请公布号
JPH05211147(A)
申请公布日期
1993.08.20
申请号
JP19920269430
申请日期
1992.09.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OGAWA SHINICHI;NISHIMURA HIROSHI;YAMADA TATSUYA
分类号
H01L23/52;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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