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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05308120(A)
申请公布日期
1993.11.19
申请号
JP19920137820
申请日期
1992.04.28
申请人
HITACHI LTD
发明人
YAMAGUCHI TAKASHI
分类号
H01L27/04;H01L21/822;H01L29/94;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
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地址
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