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发明名称
SILICON OXIDE FILM FORMING METHOD
摘要
申请公布号
JPH05308070(A)
申请公布日期
1993.11.19
申请号
JP19920137807
申请日期
1992.04.30
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
HONMA YOSHIKAZU;SUZUKI MINEHARU;TAKAOKA HIDETOSHI;KUROSAWA MASARU
分类号
H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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