SCANNING TYPE ELECTRON MICROSCOPE,申请号JP19920187676-传众专利搜索

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发明名称	SCANNING TYPE ELECTRON MICROSCOPE
摘要
申请公布号	JPH065241(A)	申请公布日期	1994.01.14
申请号	JP19920187676	申请日期	1992.06.22
申请人	OKI ELECTRIC IND CO LTD	发明人	WATANABE AKIRA
分类号	G01R31/302;H01J37/147;H01J37/244;H01J37/28;H01L21/66;(IPC1-7):H01J37/147	主分类号	G01R31/302
代理机构		代理人
主权项
地址

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