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经营范围
发明名称
COATING APPARATUS
摘要
申请公布号
JPH06190326(A)
申请公布日期
1994.07.12
申请号
JP19920347362
申请日期
1992.12.25
申请人
TOSHIBA CORP
发明人
TAKEDA ATSUSHI
分类号
B05C11/08;G02F1/13;G02F1/1333;G03F7/16;H01L21/027;(IPC1-7):B05C11/08;G02F1/133
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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