| 发明名称 |
Allyltellurides and their use in the mocvd growth of group II-VI epitaxial films |
| 摘要 |
Methyl allyltelluride is described for use in a process for depositing group II-VI epitaxial films in semiconductor manufacture. The films are grown on crystalline substrates in a MOCVD reactor. |
| 申请公布号 |
IE61292(B1) |
申请公布日期 |
1994.10.19 |
| 申请号 |
IE19880001006 |
申请日期 |
1988.04.06 |
| 申请人 |
AMERICAN CYANAMID COMPANY |
发明人 |
VALENTINE DONALD JR;BROWN DUNCAN WILLIAM |
| 分类号 |
C01B19/04;C07C67/00;C07C325/00;C07C395/00;C30B25/02;C30B29/48;H01L21/365 |
主分类号 |
C01B19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
