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发明名称
CRYOGENIC TRAP
摘要
申请公布号
JPH06299966(A)
申请公布日期
1994.10.25
申请号
JP19930111064
申请日期
1993.04.14
申请人
ULVAC JAPAN LTD
发明人
YUYAMA JUNPEI
分类号
F04B37/16;F25B9/00;(IPC1-7):F04B37/16
主分类号
F04B37/16
代理机构
代理人
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