发明名称 Etching basket
摘要 The etching basket is intended to accommodate a semiconductor wafer (23) to be cut up into a plurality of elements after immersion of the basket in an etching bath. The basket includes, at its lower part and at its upper part, two corresponding male (10) and female (9) interlocking structures, the upper interlocking structure (9) being arranged to accommodate the wafer (23). <IMAGE>
申请公布号 FR2704693(A1) 申请公布日期 1994.11.04
申请号 FR19930004944 申请日期 1993.04.27
申请人 SAGEM 发明人 COINTREL JEAN-PIERRE
分类号 H01L21/673;(IPC1-7):H01L21/68 主分类号 H01L21/673
代理机构 代理人
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