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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH06314723(A)
申请公布日期
1994.11.08
申请号
JP19930101635
申请日期
1993.04.28
申请人
NEC CORP
发明人
KANO ISAO
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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