| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that can reduce variations in accuracy of physical quantity detection, a method for manufacturing the physical quantity sensor, an electronic apparatus, and a moving object.SOLUTION: A physical quantity sensor 1 includes: a substrate 21 with an internal terminal 24; a lid part 22; a package 2 containing a container space S1; and a structure 9 in the space S1 having an IC 3 and an acceleration sensor element 4, the structure 9 being suspended above the substrate 21 by a bonding wire BY1 electrically connecting the IC 3 and the internal terminal 24 and the substrate 21 having a window part 26 allowing visual confirmation of the structure 9 being suspended above the substrate 21.SELECTED DRAWING: Figure 1 |
