发明名称 DROPLET DISCHARGE DEVICE, DROPLET DISCHARGE METHOD, AND MANUFACTURING METHOD OF DEVICE WITH FILM
摘要 PROBLEM TO BE SOLVED: To provide a droplet discharge device which can supply a droplet to a different-sized opening part of a barrier wall included in a substrate with excellent accuracy, and provide a droplet discharge method using the droplet discharge device, and a manufacturing method of a device with a film.SOLUTION: A droplet discharge device includes a head unit 18 having a first droplet discharge head 512 and a second droplet discharge head 522. The first droplet discharge head 512 and the second droplet discharge head 522 are arranged along a main scanning direction of scanning the head unit 18 with respect to a substrate in discharging droplets, and each of them has a plurality of first discharge nozzles 511 and second discharge nozzles 521. The plurality of first discharge nozzles 511 and second discharge nozzles 521 are respectively arranged side by side in a sub-scanning direction orthogonal to the main scanning direction, and a nozzle pitch of the second discharge nozzles 521 is smaller than a nozzle pitch of the first discharge nozzles 511.SELECTED DRAWING: Figure 2
申请公布号 JP2016168516(A) 申请公布日期 2016.09.23
申请号 JP20150048075 申请日期 2015.03.11
申请人 SEIKO EPSON CORP 发明人 JITSUKATA TAKAHITO
分类号 B05C5/00;B05C11/10;B05D1/26;B41J2/01;H05B33/10;H05B33/12;H05B33/22 主分类号 B05C5/00
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