| 摘要 |
In this charged particle beam device, when a sample chamber (18) is to be placed in a high-vacuum state, a charged particle gun chamber (1) and the sample chamber are evacuated via a main intake (11) of a turbo molecular pump, and when the sample chamber is to be placed in a low-vacuum state, the sample chamber is evacuated via an intermediate intake (13) of the turbo molecular pump while the charged particle gun chamber is evacuated via the main intake. An oil rotation pump (7) for performing back pressure exhausting of the turbo molecular pump does not directly evacuate the charged particle gun chamber or the sample chamber. It is thereby possible to minimize contamination of the device interior in both high-vacuum and low-vacuum states, which makes it possible to prevent contamination of the observed sample and reduce deterioration over time in the ultimate vacuum. |
