摘要 |
A complex gas separation membrane having an increased oxygen selectivities and permeabilities, comprises a porous support for membrane, a deposited active silicone compound layer on the support and a plasma treated layer of a polymerizable organic fluoride compound. Thus, a hexamethyldisiloxane monomer was polymerized in N2 gas, 5 mm Torr on a round porous membrane support. A thickness of the active layer is 5,000 ∦ for 10 min, 10,000∦ for 20 min, resp.
|