HEAT-TREATING DEVICE AND HEAT TREATMENT,申请号JP19930350952-传众专利搜索

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发明名称	HEAT-TREATING DEVICE AND HEAT TREATMENT
摘要
申请公布号	JPH07201765(A)	申请公布日期	1995.08.04
申请号	JP19930350952	申请日期	1993.12.28
申请人	SONY CORP	发明人	YAMAMOTO HIROSHI
分类号	G01J5/00;G05D23/24;G05D23/27;H01L21/22;H01L21/31;H01L21/324;H01L21/66;(IPC1-7):H01L21/22	主分类号	G01J5/00
代理机构		代理人
主权项
地址

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