Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
申请公布号
EP2610888(B1)
申请公布日期
2016.11.02
申请号
EP20130001553
申请日期
2010.06.14
申请人
CARL ZEISS MICROSCOPY, LLC
发明人
MCVEY, SHAWN;DIMANNA, MARK;BASSETT, BRIAN;COMUNALE, RICHARD;BARRISS, LOUISE;SANFORD, A. COLIN;NOTTE, A. JOHN;GROHOLSKI, ALEXANDER