Charged beam irradiating apparatus having a cleaning means and a method of cleaning a charged beam irradiating apparatus

摘要

A charged beam irradiating apparatus, comprises a charged beam generating means, a vacuum chamber having a part exposed by the charged beam, the part exposed having contaminations deposited thereon, a gas introducing system connected to the chamber which includes a means for producing electrically neutral active species for removing the contaminations and selectively carrying the species into the chamber, and a system for exhausting the chamber.