发明名称 |
Precision machining method, precision machining apparatus and data storage apparatus using the same |
摘要 |
A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.
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申请公布号 |
US5471064(A) |
申请公布日期 |
1995.11.28 |
申请号 |
US19930120541 |
申请日期 |
1993.09.14 |
申请人 |
HITACHI, LTD. |
发明人 |
KOYANAGI, HAJIME;HOSAKA, SUMIO;IMURA, RYO |
分类号 |
B82B3/00;G01Q30/02;G01Q60/00;G01Q60/10;G01Q60/12;G01Q60/18;G01Q60/24;G01Q60/40;G01Q60/56;G01Q60/58;G01Q70/14;G01Q80/00;G11B9/00;G11B9/14;G11B11/00;G11B11/03;H01J37/28;H01J37/30;(IPC1-7):H01J37/30 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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