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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07321230(A)
申请公布日期
1995.12.08
申请号
JP19940131444
申请日期
1994.05.20
申请人
NIPPON STEEL CORP
发明人
ISHIKAWA AKIO
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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