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发明名称
MULTICHAMBER DEVICE
摘要
申请公布号
JPH07321175(A)
申请公布日期
1995.12.08
申请号
JP19940109462
申请日期
1994.05.24
申请人
HITACHI LTD
发明人
ISHIKAWA KATSUHIKO
分类号
H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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