DISCHARGE LAMP FOR SEMICONDUCTOR EXPOSURE,申请号JP19940160791-传众专利搜索

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发明名称	DISCHARGE LAMP FOR SEMICONDUCTOR EXPOSURE
摘要
申请公布号	JPH087835(A)	申请公布日期	1996.01.12
申请号	JP19940160791	申请日期	1994.06.21
申请人	USHIO INC	发明人	YASUDA YUKIO;NAKAMURA KIYOTADA
分类号	H01J61/20;(IPC1-7):H01J61/20	主分类号	H01J61/20
代理机构		代理人
主权项
地址

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