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发明名称
GETTERING METHOD
摘要
申请公布号
JPH0831839(A)
申请公布日期
1996.02.02
申请号
JP19940168033
申请日期
1994.07.20
申请人
NIPPON PRECISION CIRCUITS KK
发明人
KIYONO TATSUYA
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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