DEPOSITION METHOD OF POLYSILICON FOR EG,申请号JP19940184044-传众专利搜索

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发明名称	DEPOSITION METHOD OF POLYSILICON FOR EG
摘要
申请公布号	JPH0831837(A)	申请公布日期	1996.02.02
申请号	JP19940184044	申请日期	1994.07.12
申请人	MITSUBISHI MATERIALS SHILICON CORP;MITSUBISHI MATERIALS CORP	发明人	YAMAMOTO MINORU;FUJIWARA TSUTOMU;TAKAISHI KAZUNARI;ENDO MITSUHIRO
分类号	H01L21/205;H01L21/322;(IPC1-7):H01L21/322	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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