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发明名称
PATTERN FORMING METHOD
摘要
申请公布号
JPH0831771(A)
申请公布日期
1996.02.02
申请号
JP19940161202
申请日期
1994.07.13
申请人
OKI ELECTRIC IND CO LTD
发明人
KIMURA TAMOTSU
分类号
H01L21/285;H01L21/288;H01L21/306;(IPC1-7):H01L21/288
主分类号
H01L21/285
代理机构
代理人
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地址
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