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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
JPH0831745(A)
申请公布日期
1996.02.02
申请号
JP19940160239
申请日期
1994.07.12
申请人
KOKUSAI ELECTRIC CO LTD
发明人
MAEDA TAKAHIRO
分类号
C30B25/16;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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