METHOD FOR SETTING UP A CVD OF HIGH TEMPERATURE FILAMENT FOR DIAMOND COMPOUND

摘要

The method for installing filament improves the stability of filament by eliminating torsion and compressive stress caused by carburization and thermal expansion of filament. The method comprises: (A) maintaining two parallel electrodes(5a, 5b) at constant distance; (B) installing the filament(1) between the electrodes; and (C) installing the supporter(6) in the middle of gas feeder(2) and filament to prevent the filament hanging down.