| 发明名称 |
VERWENDUNG EINES SELBSTKLEBEBANDES ZUM VORÜBERGEHENDEN FIXIEREN VON WAFERN (DICING TAPE) |
| 摘要 |
Radiation-crosslinkable self-adhesive tape (dicing tape) for temporary fixing of wafers, having a base (carrier, support) of a radiation-transparent film and a radiation-crosslinkable self-adhesive composition, characterised in that the polymeric self-adhesive composition contains copolymerised radiation initiators, and in that the adhesive strength is reduced by irradiation. |
| 申请公布号 |
AT135033(T) |
申请公布日期 |
1996.03.15 |
| 申请号 |
AT19930114121T |
申请日期 |
1993.09.03 |
| 申请人 |
BEIERSDORF AKTIENGESELLSCHAFT |
发明人 |
SPIES, MANFRED, DR.;HARDER, CHRISTIAN, DR.;GUSE, GUENTER, DR.;FELDT, CLAUDIA;MEYER, ROBERT |
| 分类号 |
B32B27/00;B32B27/18;C08J7/02;C09J7/02;C09J201/00;H01L21/301;H01L21/68;H01L21/683;(IPC1-7):C09J7/02 |
主分类号 |
B32B27/00 |
| 代理机构 |
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代理人 |
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