Combined crystal retainer and contact system for deposition monitor sensors

摘要

A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.

主权项

1. A combination retainer and electrical contact mechanism for use in a deposition monitor sensor, said mechanism comprising:
a sensor body having a fixed electrical contact disposed therein; a monitor crystal; a crystal holder configured for retaining said monitor crystal within an axial bore, said crystal holder being engaged within a receiving cavity of said sensor body; a removable flexible contact spanning between the fixed electrical contact element in the sensor body and one face of the retained monitor crystal such that the removable flexible contact directly contacts both the fixed electrical contact element and the face of the retained monitor crystal; and a retainer configured for insulating or insuring electrical isolation of the removable flexible electrical contact and in which at least one retainer and said flexible electrical contact includes at least one feature for securably maintaining said flexible removable electrical contact.