Magnetostrictive film, magnetostrictive element, torque sensor, force sensor, pressure sensor, and manufacturing method therefor

摘要

For providing a magnetostrictive film that can exhibit high magnetostrictive properties in the vicinity of zero magnetic field and their manufacturing methods, a magnetostrictive film thermal sprayed on an object under test includes a metallic glass film subjected to thermal processing at a temperature lower than the glass transition temperature and not lower than the Curie point, and shows a linearity between the magnetic field and the magnetostriction in at least a part of the magnetic field from −15 kA/m to +15 kA/m (both inclusive).

主权项

1. A magnetostrictive film thermal sprayed on an object under test, including a metallic glass film applied as a supercooled liquid having a supercooled liquid temperature range ΔTx equal to or more than 30° C., subjected to thermal processing at a temperature lower than the glass transition temperature and not lower than the Curie point, and showing a linear relationship between the magnetic field and the magnetostriction in at least a part of the magnetic field ranging from −15 kA/m to zero and in at least a part of the magnetic field ranging from zero to +15 kA/m, and having a variation due to magnetostriction of a test specimen measured at the following conditions:
using a test specimen comprising a 3 mm×25 mm, 0.3 mm-thick rectangular substrate and a 200 μm-thick magnetostrictive film formed on the substrate by thermal spraying; and applying a magnetic field of from −80 kA/m up to +80 kA/m to the test specimen, wherein the variation due to magnetostriction is at least 15 μm or greater and at most 30 μm or smaller in the magnetic field ranging from −15 kA/m to +15 kA/m.