发明名称 |
AN APPARATUS FOR GENERATION OF A LINEAR ARC DISCHARGE FOR PLASMA PROCESSING |
摘要 |
An apparatus for generation of a linear arc discharge for plasma processing, particularly for surface processing of solid substrates, installed in a reactor held at gas pressures below 5 x 10<4> Pa and powered by a generator of alternating current and/or pulsing power (10), and including: at least one pair of a first electrode plate (1) and a second electrode plate (2) placed opposite to each other at a distance exceeding 0.4 mm and connected to the same pole of the generator which has a counter pole connected to a counter electrode (3), a magnetic field produced by magnets (4) for development of a linear hot zone (5) on the first electrode plate and a linear hot zone (6) on the second electrode plate, having a component of at least 10<-3> Tesla across the slit between these electrode plates, an ionized environment (7) containing a working gas (8) involved between the electrode plates and having electrical contact with the electrode plates where an arc discharge (9) is generated and with the counter electrode.
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申请公布号 |
WO9616531(A1) |
申请公布日期 |
1996.05.30 |
申请号 |
WO1995SE01248 |
申请日期 |
1995.10.20 |
申请人 |
BARDOS, LADISLAV;BARANKOVA, HANA |
发明人 |
BARDOS, LADISLAV;BARANKOVA, HANA |
分类号 |
H05H1/34;C23C14/24;C23C14/40;C23C16/50;H01L21/31;H05H1/48;H05H1/50;(IPC1-7):H05H1/46;H01J37/34 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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