发明名称 Method for forming a dynamic contact which can be either on or off or switched therebetween
摘要 A vertically raised transistor (10) is formed having a substrate (12). A conductive plug region (22) is selectively or epitaxially formed to vertically elevate the transistor (10). A first doped region (16a) and a second doped region (16b) are each electrically coupled to the conductive plug region (22) via sidewall contacts. The doped regions (16a and 16b) are used to form current electrode regions (26) within the conductive plug region (22). A channel region separates the current electrodes (26). A gate dielectric layer (28) is formed to overlie the channel region. A conductive layer (30) is formed to overlie the gate dielectric layer (28). Conductive layer (30) forms a gate electrode for the transistor (10). The vertical raised transistor (10) and conductive plug region (22) provide improved device isolation and improved device operation.
申请公布号 US5527723(A) 申请公布日期 1996.06.18
申请号 US19940316754 申请日期 1994.10.03
申请人 MOTOROLA, INC. 发明人 WITEK, KEITH E.;FITCH, JON T.;MAZURE, CARLOS A.
分类号 H01L21/336;H01L27/06;H01L27/118;H01L29/417;H01L29/735;H01L29/78;(IPC1-7):H01L21/265 主分类号 H01L21/336
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