| 摘要 |
FIELD: vacuum pumps depending for their operation on absorption of chemically active gases. SUBSTANCE: getter pump has many sintered porous rings arranged in appropriate manner and made of nonevaporating getter material; they have first flat surface with central hole, second flat surface with wider central hole arranged in parallel with former surface and spaced from it at distance "d" of 1-10.5 mm, third intermediate flat surface spaced from first surface at distance "t" of 0.5-5.0 mm and provided with hole coaxial to that of first surface; firstly surface of next ring is in contact with second surface of preceding ring and first surface of next ring is spaced from third surface of preceding ring through gas duct height "c" of 0.5-10 mm. EFFECT: improved capacity of getter pump. |
