| 申请人 |
TOKYO ELECTRON LTD., TOKIO/TOKYO, JP;KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP |
发明人 |
TAHARA, YOSHIFUMI, A202 HACHIBANCHI-CORPO,, KANAGAWA-KEN, JP;HIRANO, YOSHIHISA, 303 SANNO-HEIGHTS,, YOKOHAMA-SHI, JP;HASEGAWA, ISAHIRO, C/O INTELLECTUAL PROP. DIV, MINATO-KU, TOKYO 105, JP;HORIOKA KEIJI, C/O INTELLECTUAL PROP. DIV., MINATO-KU, TOKYO 105, JP |
