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发明名称
SEMICONDUCTOR DEVICE AND PRODUCTION THEREOF
摘要
申请公布号
JPH08222652(A)
申请公布日期
1996.08.30
申请号
JP19950028351
申请日期
1995.02.16
申请人
HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD
发明人
KIKUCHI HIROSHI;HAYASHIDA TETSUYA;SATO TOSHIHIKO;GOTO MASAKATSU
分类号
H01L21/60;H01L23/02;H01L23/15;(IPC1-7):H01L23/02
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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