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发明名称
FORMATION OF THIN FILM FOR INSPECTION AND REMOVAL OF IMPURITIES
摘要
申请公布号
JPH08274034(A)
申请公布日期
1996.10.18
申请号
JP19950097667
申请日期
1995.03.31
申请人
CASIO COMPUT CO LTD
发明人
OTANI TOMOHIKO
分类号
C23C16/44;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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