发明名称 |
Calibration standards for profilometers and methods of producing them |
摘要 |
Adjacent shaped grooves are placed in single crystal structure with great accuracy and known dimensions by a combination of anisotropic and isotropic etching to produce a scanning probe microscope calibration standard with fine V-shaped grooves forming a prismatically shaped ridge or blade between them. A probe microscope to be calibrated is used to profile the tip of the ridge in a number of places along the length of the ridge. With knowledge of the sidewall angles and tip radius of the calibration standard both the flat tip dimensions of a probe with a flared tip and the tip radius of a probe with a conical tip can be calculated from the profile they produce.
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申请公布号 |
US5578745(A) |
申请公布日期 |
1996.11.26 |
申请号 |
US19950419295 |
申请日期 |
1995.04.10 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAYER, THOMAS;GRESCHNER, JOHANN;MARTIN, YVES;MEISSNER, KLAUS;WEISS, HELGA |
分类号 |
G01N1/00;G01B1/00;G01B7/34;G01N27/00;G01N37/00;G01Q40/02;H01L21/20;(IPC1-7):H01L21/20 |
主分类号 |
G01N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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