发明名称 |
Method of manufacturing photoluminescing semiconductor material using lasers |
摘要 |
A method for the manufacture of a photoluminescing layer on a normally non-photoluminescing semiconductor substrate, such as a porous silicon layer created on a silicon substrate, by treating the surface of the substrate with a relatively high energy, pulsed laser beam.
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申请公布号 |
US5597621(A) |
申请公布日期 |
1997.01.28 |
申请号 |
US19950566088 |
申请日期 |
1995.12.01 |
申请人 |
UNIVERSITY OF FLORIDA |
发明人 |
HUMMEL, ROLF E.;LUDWIG, MATTHIAS H.;VALA, MARTIN |
分类号 |
H01L33/34;(IPC1-7):B05D3/06 |
主分类号 |
H01L33/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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