Verfahren zur abstandsgenauen Umhüllung mit funktionstragenden Schichten versehener Bauelemente und danach hergestellte Bauelemente,申请号DE1995118027-传众专利搜索

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发明名称	Verfahren zur abstandsgenauen Umhüllung mit funktionstragenden Schichten versehener Bauelemente und danach hergestellte Bauelemente
摘要
申请公布号	DE19518027(C2)	申请公布日期	1997.05.15
申请号	DE1995118027	申请日期	1995.05.17
申请人	LUST HYBRID-TECHNIK GMBH, 07629 HERMSDORF, DE	发明人	WALTHER, THOMAS, 07629 HERMSDORF, DE;LENTZY, KARL-HEINZ, 07629 HERMSDORF, DE;KRETSCHMANN, RALPH, 07629 HERMSDORF, DE
分类号	H01L21/56;(IPC1-7):H01L21/56;H01L21/58;H01L23/28	主分类号	H01L21/56
代理机构		代理人
主权项
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