发明名称 |
Magnetic orienting device for thin film deposition and method of use |
摘要 |
A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).
|
申请公布号 |
US5630916(A) |
申请公布日期 |
1997.05.20 |
申请号 |
US19950369381 |
申请日期 |
1995.01.06 |
申请人 |
CVC PRODUCTS, INC. |
发明人 |
GERRISH, KEVIN S.;BALLENTINE, PAUL H.;HEIMANSON, DORIAN;STEPHENS, II, ALAN T. |
分类号 |
C23C14/35;G11B5/851;G11B5/852;H01F41/18;H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/35 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|