发明名称 |
Device for transferring a transport object between two end positions |
摘要 |
The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.
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申请公布号 |
US5636724(A) |
申请公布日期 |
1997.06.10 |
申请号 |
US19950396673 |
申请日期 |
1995.03.01 |
申请人 |
JENOPTIK TECHNOLOGIE GMBH |
发明人 |
SCHELER, WERNER;GRAEFE, JUERGEN;MAGES, ANDREAS;BIRKNER, ANDREAS;ADLER, ERICH |
分类号 |
B65G49/07;H01L21/677;H01R13/24;H01R41/00;(IPC1-7):B65G47/24 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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