RETICLE TRANSFER APPARATUS WITH PRE-ALIGNMENT PROCESS

摘要

A reticle transferring and driving apparatus having a variable pre-alignment function capable of forming an image on a sensitive material which is coated on a wafer is disclosed. In the apparatus, a pre-alignment mechanism is mounted next to an edge of a reticle(4) at 90= . A pre-alignment operation is performed in X, Y or direction and XY and directions. A transferring system is transferred into an optical axis(1) along two LM guides(14). A reticle driving section processes an analog signal from a light receiving sensor(7) according to the pre-alignment result and drives a reticle(4) in an XY direction and direction by combinations of a hinge spring(24) and a gear motor(18) and a rotating bearing(17) and the gear motor(18), respectively.