| 发明名称 |
Method of making semiconductor devices by patterning a wafer having a non-planar surface |
| 摘要 |
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| 申请公布号 |
EP0803905(A3) |
申请公布日期 |
1997.12.29 |
| 申请号 |
EP19970302564 |
申请日期 |
1997.04.15 |
| 申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
CAPPUZZO, MARK ANTHONY;SHMULOVICH, JOSEPH;KANE, CASEY FRANCIS |
| 分类号 |
H01L21/28;H01L21/027;H01L21/312;H01L21/3213;H01L21/768;(IPC1-7):H01L21/768 |
主分类号 |
H01L21/28 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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