发明名称 THIN FILM TRANSISTOR AND ITS MANUFACTURING METHOD, ARRAY SUBSTRATE, AND DISPLAY DEVICE
摘要 A thin film transistor and its manufacturing method, an array substrate and a display device are disclosed, the thin film transistor is of a gate bottom contact type, and includes a gate electrode (3) and a gate insulation layer (2), the gate insulation layer (2) is provided with a recess (4) at a position corresponding to the gate electrode (3). With the thin film transistor, the problem of wire breakage in the active layer at the channel between the source/drain electrodes can be avoided, the performance and stability of the thin film transistor is improved, and the production cost is lowered down.
申请公布号 US2016276606(A1) 申请公布日期 2016.09.22
申请号 US201414769670 申请日期 2014.11.07
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 FONG Honhang;XIE Yingtao;OUYANG Shihong;CAI Shucheng;SHI Qiang;LIU Ze
分类号 H01L51/05;H01L29/786;H01L29/66;H01L51/10;H01L27/28 主分类号 H01L51/05
代理机构 代理人
主权项 1. A thin film transistor, of a gate bottom contact type, comprising a gate electrode and a gate insulation layer, wherein the gate insulation layer is provided with a recess at a position corresponding to the gate electrode.
地址 Beijing CN